Chambergard™ Fast Vent Diffusers reduce particles and vent times in load lock and transfer chambers. By combining the flow characteristics of a diffuser with a high-efficiency filter, Chambergard™ Fast Vent Diffusers increase efficiency and throughput.
- Increase system throughput by minimizing load lock vent cycle time
- Provides rapid venting without disturbing or adding particles to wafers
- Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput
Product Specifications:
| Materials: | Diffuser element: Patented, sintered nickel membrane filter |
| Housing: 316L stainless steel | |
| Surface finish internal: ≤32 μin Ra | |
| Performance: | Downstream cleanliness: Cleanliness less than 0.03 particles/liter (<1 particle/ft3) greater than 0.01 μm at rated flow |
| Removal rating: ≥0.003 μm | |
| Reliability: 100,000 cycle reliability at maximum rated inlet pressure at 25°C (77°F) | |
| Datasheet: | Chambergard™ Fast Vent Diffusers - PDF |