Gas Purifiers

FAB SUPPORT AB has chosen to work with Entegris Pure Gas, the largest global supplier of bulk and point-of-use gas purifiers for a wide range of gases.

GateKeeper® GPU Gas Purifiers

Entegris GPU gas purifiers efficiently remove halogenated gases, hydrides, reactive oxides, saturated and unsaturated hydrocarbons, fluorocarbons and chlorocarbons at a variety of flow rates.

GateKeeper® HGU Heated Getter Gas Purifiers

Entegris PS2, PS3, PS4 gas purifiers efficiently remove H2O, O2, CO, CO2, H2, N2, and THC at flow rates of up to 150 slpm (9 Nm3/hr).

GateKeeper® EX Series Gas Purification Systems

The GateKeeper® Gas Purification System (GPS) EX series is the latest continuous service gas purification system from Entegris. This advanced gas purification technology provides semiconductor manufacturers with an innovative, efficient and cost effective solution to purify purge gases used in a dry and immersion-based lithography tools.

MegaTorr® Palladium Hydrogen Gas Purifiers

Entegris PD Series H2 gas purifiers efficiently remove H2O, O2, CO, CO2, H2, THC, N2, He, and Ar at flow rates up to 2,170 slpm (130 Nm3/hr).

CollectTorr: AMC Sampling Service

The AMC Sampling Service from Entegris is an economical way to determine molecular contamination in Nitrogen, Carbon Dioxide, CDA or Cleanroom Air. Detection limits are low Part-Per-Trillion (pptV) for Acids, Bases, Organics, or Refractory Compounds.

Please contact us for assistance in choosing the right purifier for your needs.

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