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Gas Diffusers

Chambergard™ Fast Vent Diffusers reduce particles and vent times in load lock and transfer chambers. By combining the flow characteristics of a diffuser with a high-efficiency filter, Chambergard™ Fast Vent Diffusers increase efficiency and throughput.

  • Increase system throughput by minimizing load lock vent cycle time
  • Provides rapid venting without disturbing or adding particles to wafers
  • Combines flow characteristics of a diffuser with a high-efficiency filter to increase efficiency and throughput

Product Specifications:

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